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商品明細

電子特殊氣體

料號：Specialty Gases

商品詳細介紹Product Introduction

氣體	分子式	純度(%)
Ammonia	NH₃	5N~6N
Arsine	AsH₃	5N~6N
Boron trichloride	BCl₃	4N~5N
Boron trifluoride	BF₃	3N~5N
Chlorine	Cl₂	4N~5N
Diborane	B₂H₆	2N~4N
Dichlorosilane	SiH₂Cl₂	2N~3N
Disilane	(SiH₃)₂	5N
Germane	GeH₄	5N
Germanium tetrafluoride	GeF₄	3N
Halocarbon 14	CF₄	4N~5N
Halocarbon 23	CHF₃	2N~5N
Halocarbon 32	CH₂F₂	3N
Halocarbon 116	C₂F₆	4N
Halocarbon 218	C₃F₈	4N~5N
Halocarbon c318	C₄F₈	4N
Hydrogen bromide	HBr	5N
Helium	He	4N~6N
Hydrogen fluoroide	HF	4N
Methylsilane	CH₃SiH₃	4N
Nitrogen trifluoride	NF₃	4N
Phosphine	PH₃	5N~6N
Silance	SiH₄	4N~6N
Silicon tertrachloride	SiCl₄	4N
Silicon tertrafluoride	SiF₄	4N
Sulfur dioxide	SO₂	4N
Sulfur hexafluoride	SF₆	3N~5N
Trichlorosilane	SiHCl₃	3N
Trimethylboron	B(CH₃)₃	2N
Tungsten hexafluoride	WF₆	5N

商品注意事項Product Notes

我們提供各種高純度特殊氣體及混合氣體，供應半導體、面板、LED 及太陽能等相關產業製程應用。